• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
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  • 法律状态
  • 优先权
    • 专利摘要:
    Thermal source of resistive type for deposition of thin sheets by vacuum evaporation. It comprises: - a grill (10, 11) that is formed by a plurality of threads (12) of refractory metal that are juxtaposed side by side in parallel, the grill (10, 11) being intended to support an amount of a molten evaporating material (13), to be evaporated under vacuum in order to form a thin sheet-shaped deposit, where the threads (12) comprise two ends; and two connection sleeves (14), located at the ends, and that hold all the wires (12) together, and facilitate the connection of the wires (12) with an electricity source. A straight grill (10) can be used, with straight threads (12), or a curved grill (11), with threads (12) that have a curved part forming a level difference (R). (Machine-translation by Google Translate, not legally binding)
    公开号:ES2770131A1
    申请号:ES201831305
    申请日:2018-12-31
    公开日:2020-06-30
    发明作者:Candao Jose Antonio Aznarez；Morales Jose Antonio Mendez；Orejuela Jose Maria Sanchez；Goicoechea Juan Ignacio Larruquert
    申请人:Consejo Superior de Investigaciones Cientificas CSIC；
    IPC主号:
    专利说明:

    [0001] RESISTIVE TYPE THERMAL SOURCE FOR DEPOSITION OF THIN FILMS
    [0003] OBJECT OF THE INVENTION
    [0005] The invention is framed in the Condensed Matter Physics sector, and in particular in the Vacuum Thin Sheet Preparation subsector, with applications in multiple areas, from Optics to Metallurgy.
    [0007] BACKGROUND OF THE INVENTION
    [0009] The preparation of thin sheets of various materials by vacuum deposition begins in the late nineteenth century and becomes increasingly important as the twentieth century progresses. Among many other works, we can cite those of J.Strong in the 1930s for his contribution to the preparation of mirrors for telescopes by evaporating aluminum from resistive sources. Also, the works of Hass, Hunter, Tousey, Osantowski and others, published over the course of more than a decade around the 1960s.
    [0011] To carry out these vacuum depositions, different types of evaporation sources have been designed and manufactured, such as furnaces, crucibles and filaments. In particular, sources known as resistive sources, which are made of resistive materials formed by metals with a high melting point and non-negligible electrical resistance, acquired a rapid development, which allows their heating through the passage of an electric current. In resistive sources, the material to be evaporated, called evaporating material, is in direct contact with the resistive material. Of these types of sources, the most common are the so-called "boats" and "filaments", depending on whether they are manufactured respectively with sheets or with threads of the resistive material. The boats emit the vapor of the evaporating material at most in one hemisphere, while the filaments do so in practically the entire solid angle. The boats can be more efficient in taking advantage of the load of the evaporating material; however, their reduced thickness makes them sensitive to the corrosion that can derive from the reaction with certain molten evaporators, for example, aluminum, which significantly reduces their useful life.
    [0012] The most commonly used materials for the manufacture of resistive evaporation sources are tungsten, molybdenum and tantalum, which constitute the so-called refractory metals, which combine a high melting point, a low vapor pressure, even at high temperatures, and are relatively inert to the reaction with the materials to evaporate. Obviously, they must be compatible with the process to be carried out, that is, they must be able to withstand the current that passes through them in order to evaporate the selected evaporating material, and must not undergo corrosion phenomena caused by the evaporating material in a molten state.
    [0014] The filaments made with these refractory metals have acquired great development, as they are effective in transmitting heat to the material to be evaporated; they are cheap and easy to manufacture, as well as simple to install and put into operation. The most widespread models are those with a helical shape and conical baskets, with different dimensions and wire diameters, and all of them made with single wires or braided wires. The attached Figure 1 describes an example of a helical type model.
    [0016] The different models of these resistive evaporation sources are described in detail in the product catalogs of the main companies related to the field of vacuum technology and the preparation of thin sheets.
    [0018] The most common list of materials that can be evaporated through filaments includes: Aluminum; Antimony; Cobalt; Chrome; Strontium; Iron; Manganese; Nickel; Ni / Cr nichrome; Niobium; Palladium; Platinum; Platinum / Palladium (alloy); Titanium; Yttrium-Aluminum oxide (Y3Al15O12); Zirconium.
    [0020] The helical filaments (1) as shown in Figure 1 constitute a very widely used resistive thermal source configuration, although the use of the helical filaments (1) as evaporation sources for the production of thin sheets in vacuum presents certain limitations. They are mainly the following:
    [0022] 1. Limitation on the mass of evaporator that can be loaded on the helical filament (1).
    [0024] This is primarily due to the fact that the maximum amount of evaporator is determined by the cylindrical hole (2) of the propeller, where the most common standards hardly exceed 10 mm in diameter for said hole (2).
    [0025] This maximum limit is necessarily reduced since, if the evaporator load is large, two problematic situations can occur: 1) That, at the moment of evaporation melting, also called "charge", a part of the charge falls off the helical filament (1) because the weight of the melt is greater than the adhesion of the load to the helical filament (1); and 2) That the melted evaporator forms bridges between the turns (3) of the helical filament (1). Due to their lower electrical resistance and higher mass, they are at a lower temperature than that of the other parts of the helical filament (1), simply impregnated, and therefore, lead to inefficient evaporation. In addition, a sudden transition is created from high to low temperature at the point of connection of the helical filament (1) -bridge. In the high temperature zone, rapid wear and consequent breakage of the helical filament (1) can occur due to self-evaporation. In addition, in the case of q As the molten evaporator reacts with the refractory material of the filament, the wear rate of the helical filament (1) at the insertion point is increased and thus its rapid rupture.
    [0027] If the bridges between turns (3) are formed near the ends of the helical filament (1), the negative effect increases. The ends are cooler areas than the center due to the influence of connecting jaws, not shown in Figure 1, which connect the helical filament (1) to electrodes, and which act as heat sinks. Consequently, the bridge material is unusable for evaporation because it is not convenient to raise the temperature of those cold zones of the helical filament (1) until reaching evaporation values. In many cases, this temperature rise could not be achieved, or would require a large increase in the electrical power supplied. And, on the other hand, by raising the temperature of the areas that we have called "cold", the temperature of the central areas of the filament rises considerably, accelerating self-evaporation and subsequent breakage of the helical filament (1).
    [0029] 2. Influence of the charge limitation on the cost of the evaporation source.
    [0031] The limitation of charge, as explained above, may require a multiplication of the number of evaporation sources and / or a frequent replacement of said evaporation sources, in order to have helical filaments (1) in optimal conditions. Quantitatively, considering a quotient between the mass of the evaporating material and the mass of the material (for example, tungsten) that constitutes the helical filament (1), we have that, if the referred quotient is lower, it means that the mass of the filament helical (1) that it is necessary to evaporate a unit of evaporator mass is higher, so it is desirable to have sources with a higher quotient, which would translate into a lower economic cost.
    [0033] 3. Low reliability in the confinement of the evaporator charge.
    [0035] The need to handle larger amounts of evaporator requires increasing the diameter of the coils (3). Also, the interest in avoiding the formation of bridges between turns (3) by the melted evaporator, leads to a separation between turns (3) that cannot be small, which increases the risk that a part of the mass of the melted evaporator may fall. Taken together, all this supposes an uncertainty in the operation of fusion, extension and confinement of the evaporator in the entire dimension of the helical filament (1).
    [0037] 4. Low efficiency of steam emission from the helical filament (1).
    [0039] The emission of steam from a helical filament (1) occurs in the practically complete solid angle around it, with less emission in the axial direction of the helical filament (1). This distribution allows evaporations to be carried out on substrates placed both above and below the helical filaments (1), as for example in the case of some telescope mirrors. However, since in almost all cases the substrate on which the material is deposited occupies only a small part of a hemisphere, the consequence is that a not insignificant part of the evaporated material is wasted, since it ends up at the walls of the evaporation chamber or to equivalent protective or masking surfaces.
    [0041] US2009038541A1 refers to a deposition process in which heating is carried out by at least one filament, which can be several filaments, generally called an "array" of filaments, which can be connected both in series and in parallel, where in the case of parallel connection, the voltage is reduced by increasing the current.
    [0043] For its part, document US6582780B1 describes an array of parallel filaments for heating by passing an electric current. The array can be vertical and / or horizontal and consist of tungsten, tantalum, molybdenum, rhenium filaments (tungsten being the preferred) that are connected at their ends to two electrodes.
    [0044] Likewise, document WO2011106624A1 refers to the use of an array of filaments, both tantalum and tungsten, which are forming a grid that on the sides has two electrical contact elements through which current flows to the filament array. This publication therefore collects that the heating device is a set of first parallel filaments connected at their ends and that they are also forming a weft with other second filaments intersected in another direction with the first.
    [0046] Finally, in US5160544A various configurations are proposed for the heating filaments to suit the desired results in vacuum deposition. In particular, the heating device consists of at least two parallel filaments (tungsten or tantalum) with contact elements at their ends.
    [0048] DESCRIPTION OF THE INVENTION
    [0050] The present invention introduces a resistive type thermal source, suitable for deposition of thin sheets by vacuum evaporation (both in high vacuum and ultra high vacuum), by means of physical vapor phase deposition (PVD), where the thermal source presents improved characteristics with respect to the known evaporative resistive sources present in the usual supply for industries and laboratories.
    [0052] In the field of the invention, a "thin sheet" is understood to mean a flat layer of material whose thickness is between a fraction of nanometer (monolayer) and several micrometers.
    [0054] The invention, a multi-wire type evaporation source, improves the characteristics of the filaments and the boats, thus managing to improve the efficiency of the evaporation processes.
    [0056] The thermal source of the invention comprises a grill formed by a set of wires, preferably single wires, of refractory metal, which are juxtaposed side by side in parallel. The threads thus arranged are capable of supporting a certain amount of evaporating material, before and after being melted, which is intended to be evaporated in a vacuum to form a deposit in the form of a thin sheet.
    [0057] The evaporation source additionally comprises two connection sleeves located at its ends. These connection sleeves have a double function: on the one hand, they mechanically hold the wires that make up the grill together, connecting the wires and thus preserving the configuration of the grill. On the other hand, they ensure the electrical connection of the wires to each other and to the whole of the wires with a power source intended to feed the evaporation source, for example, with clamping jaws associated with the cable gland electrodes that provide the electric current. necessary for the operation of the source. In this way, an electric current is circulated through all the wires of the grill, preferably equally, and thus raise, if necessary uniformly, the temperature of said wires to the temperature necessary for evaporation. The connection sleeves are preferably formed by a thin sheet of good conductive and moldable metal (copper, molybdenum, tantalum, etc.) that wraps the whole of the wires at each end. The length of the thin sheet used must be enough to give between one and two turns to all the threads. The width of the thin sheet, or what is the same, that of the connection bushing, does not need to protrude from the clamping jaw associated with a corresponding electric current electrode.
    [0059] Due to its materials, formation and packaging, the multi-wire grill thermal source described above is totally suitable for the production of thin sheets by evaporation in both high-vacuum and ultra-high-vacuum systems.
    [0061] Among the most suitable evaporating materials to be evaporated using the source of the invention are those previously mentioned: Aluminum; Antimony; Cobalt; Chrome; Strontium; Iron; Manganese; Nickel; Ni / Cr nichrome; Niobium; Palladium; Platinum; Platinum / Palladium (alloy); Titanium; Yttrium-Aluminum oxide (Y3Al15O12); Zirconium.
    [0063] It is desired to emphasize that the concept of using a grill or filament in the present invention bears no relation to the use of grills or filaments in the coating deposition technique called "chemical vapor phase deposition" (CVD). Chemical vapor deposition), in some of whose variants a filament is used The documents cited in the background belong to the CVD field, in which the filament is used to dissociate the precursor gas from the deposit, so that the product of dissociation It is the one that gives rise to the deposit.In contrast to the above, the present invention is applied to the evaporative deposition technique under vacuum conditions, which is within the group of physical vapor phase deposition (PVD) techniques. physical vapor deposition.) In the present case, the objective of the filament is, for On the other hand, support the solid to be evaporated and, on the other hand, transmit heat to that solid by contact to evaporate it.
    [0065] The differences between the present invention and the cited documents can be summarized in: 1) The invention refers to the PVD field, while the cited documents are applied in CVD; 2) In the present invention there is an interaction of the filament with the evaporating material, while in the cited documents there is an interaction with a gas; 3) In the present invention, there is a physical process of evaporation of molecules, and subsequent deposition (without chemical reaction), while, in the cited documents, a chemical process of molecular dissociation and a subsequent chemical reaction take place.
    [0067] This invention proposes a simple design in its configuration and materials that allows the possibilities of evaporation sources to be increased by providing them with improved performance compared to current sources. The advantageous aspects of the present invention are set out below.
    [0069] 1. Greater load capacity of evaporating material with respect to that of the classic helical filaments.
    [0071] We take as a load reference for a helical filament that with which there will not be significant bridges between turns and there will be a high risk of falling molten load.
    [0073] When comparing the benefits of the two types of filaments (grill vs. helical filament) in units manufactured with similar dimensions, we can say that:
    [0074] - The mass of the load supported by a grill is more than twice that of a helical filament of similar length and electrical power.
    [0075] - In relative terms of evaporator mass per unit mass of the resistive metal that constitutes the evaporation source, we also found an increase in at least a factor 2 of this ratio for the grids versus the helical filaments. An improved characteristic for the grills is thus obtained in the terms mentioned above with respect to the influence of the load limitation on the cost of the evaporation source.
    [0077] 2. Greater efficiency in the emission of the new source in the zenith direction to the source.
    [0078] The difference in favor of the new source, called the grill, is that its emission in the zenith direction to the source, that is, in the direction perpendicular to the plane of the threads through its center, is greater than the emission of the helical filaments in a percentage that varies between 30% and 60% per unit of evaporated mass. Emission from the new source maintains the same possibility for helical filaments to evaporate on substrates placed both above and below the filament.
    [0080] 3. Simplification of the manufacturing process.
    [0082] The simple geometry of the new sources: it means a simplification of the production process, a reduction in the necessary resistive material and / or a reduction in the execution time of the source, all of which can mean a reduction in the manufacturing costs of the new source.
    [0084] 4. Reliability and simplicity in the placement of the evaporator charge.
    [0086] The grill has, at its lowest part, an orientation surface close to horizontal to rest the evaporator, which is more extensive and compact than that of helical filaments of similar dimensions. Therefore, the load is easily placed in its position of use and the possibility of the load falling, both in its placement and during the fusion process, is greatly reduced. This makes easier and safer handling during this phase of the material evaporation process.
    [0088] 5. Ease in regulating the evaporation temperature of new sources.
    [0090] The new design grills maintain the ease of regulating the working temperature of resistive sources, an operation that is performed by controlling the applied electrical voltage and current. This objective is easily achieved with the usual power supplies for resistive evaporative sources.
    [0092] 6. Scalable design of the proposed evaporation source.
    [0093] The design of the proposed grills is fully scalable. This allows its dimensions to be easily adapted to the dimensions of any vacuum chamber in which they are to be installed and / or to the thickness of the thin sheets to be obtained.
    [0095] 7. Compatibility of the proposed evaporation source with ultra high vacuum (UHV) processes.
    [0097] The new design grills presented here, like conventional evaporation sources, such as filaments and boats, are fully suitable for deposition of a wide range of materials in both high vacuum and ultra high vacuum UHV.
    [0099] DESCRIPTION OF THE FIGURES
    [0101] To complement the description that is being made and in order to help a better understanding of the characteristics of the invention, in accordance with a preferred example of practical embodiment thereof, a set of drawings is included as an integral part of said description. where, by way of illustration and not limitation, the following has been represented:
    [0103] Figure 1.- Shows a helical filament commonly used for thermal sources according to the state of the art.
    [0105] Figure 2.- Shows an example of a straight grill according to a preferred embodiment of the present invention, formed by nine tungsten wires of 1 mm in diameter and 85 mm in length, and loaded with 2 grams of pre-cast aluminum.
    [0107] Figure 3.- Shows a schematic drawing of a curved grill in which the dimensions of length (L), span (V) and unevenness (R) can be seen.
    [0109] Figure 4.- Shows an example of a curved grill according to another preferred embodiment of the present invention, formed by nine tungsten wires of 1 mm diameter, and a length of 96 mm, loaded with partially evaporated aluminum, showing preferential accumulation. of the aluminum load in the lower area. Form factor FF = 0.15.
    [0110] PREFERRED EMBODIMENT OF THE INVENTION
    [0112] A detailed description of a preferred embodiment of the present invention is given below with the aid of the attached aforementioned Figures 1-4. The invention relates to a thermal source of the resistive type, for depositing sheets of material, by means of vacuum vaporization.
    [0114] The source comprises a grill (10, 11) formed by a set of refractory metal wires (12) that are juxtaposed side by side in parallel. The threads (12) serve to support a quantity of molten evaporating material (13) destined to be evaporated in vacuum to form a deposit in the form of a thin sheet.
    [0116] The evaporation source additionally comprises two connection sleeves (14), located at the two ends of the wires (12) to hold all the wires (12) together. The connection sleeves (14) also facilitate the electrical connection of the set of wires (12) with an electricity source, to allow an electric current to flow through the wires (12) and heat said wires (12) in order to evaporate the evaporating material (13). Preferably, the connecting sleeves (14) wrap the set of wires (12) at each of the two ends of the wires (12). The connection sleeves (14) are preferably made of metallic material or materials, as well as preferably have a moldable character, a sufficiently high melting point and a sufficiently low vapor pressure, such as copper, molybdenum or tantalum, among others. Likewise, the connection bushings (14) can be configured as plates.
    [0118] In order to facilitate keeping the wires together by means of the connection bushing and the clamping jaw, as well as to facilitate the circulation of the same current intensity through each wire, it is preferred that all the wires of the same grill have the same diameter.
    [0120] Also, it is preferred that each wire is in contact with the wire or wires that are in an adjacent position, to facilitate the connection by means of the connection bushings.
    [0122] Two preferred examples of grills (10, 11) according to the present invention are described below.
    [0123] 1. STRAIGHT GRILLS (10).
    [0125] The straight grills (10), as shown in figure 2, are formed by a set of straight threads (12). Consequently, the straight racks (10) show a flat configuration. The straight grates (10) are preferably used when it is foreseen that in the evaporation process the entire quantity of evaporating material (13) loaded on the threads (12) will be consumed. The straight racks (10) are identified by the number of threads (12), the diameter of the thread (12) and the length of the threads (12).
    [0127] 2. CURVED GRILLS (11)
    [0129] The curved racks (11) are shown in Figures 3 and 4. The curved racks (11) can be formed from a straight grill (10) when the set of wires (12) curves at the same time as it does. the plane containing the threads (12), in such a way that the threads (12) continue to remain juxtaposed and become contained in the new curved surface. Preferably, the ends of the wires (12), wrapped in the connection sleeves (14), are kept straight, located in the original plane of the grill. In the rest of its length, the threads (12) are preferably curved, although they can also have some additional straight section. The curved portion is placed with the concavity upwards, so that a level difference is formed, also called "height" (R) between the plane of the ends and the part of the threads (12) that occupies the lowest level , also called the bottom part 15. The evaporating material 13 deposited on the threads 12 is confined, by the effect of gravity, on the bottom part 15 of the threads 12 of the curved grill 11 The identification of a curved grill (11) can be done, in addition to indicating the number of threads (12), its diameter, and its length, by means of a "form factor" (FF) that is obtained by dividing the height R by the horizontal distance between the innermost points of the ends, that is, the length, in horizontal projection, of the curved part, called the "span" (V). Thus, FF = R / V
    [0131] The curved grill (11) has better application when the mass of evaporating material (13) loaded on the threads (12) is going to be used in several successive processes involving heating and cooling of the threads (12). In particular, in the case of curved grills (11), by means of the action of gravity, the confinement of the evaporating material (13) in the lower area of the curved grill (11) is improved, thus contributing to a better use of the charge of evaporating material (13). Indeed, the evaporating materials (13), once melted, migrate when heated, so that, in grills straight (10), part of the evaporating material (13) can move towards the ends, which are colder, with which said evaporating material (13) is disabled to evaporate when not reaching a sufficient temperature. On the contrary, with the curved grills (11), by concentrating the melted evaporating material (13) in the lower part (15) of the curved grill (11), the use of the evaporating material (13) improves, consequently increasing the heat source efficiency.
    [0133] Laboratory tests have been carried out using grills (10, 11) made with different numbers of threads (12), thread diameters, lengths and unevenness (R). For example, Figure 2 shows a straight grill with 9 threads (12) of tungsten of 1 mm in diameter and 85 mm in length, loaded with 2 grams of pre-cast aluminum as evaporating material (13). Another example, not shown, refers to a straight grill (10) with 8 threads (12) of tungsten of 0.7 mm in diameter and 60 mm in length. Likewise, Figure 4 shows a curved grill (11), with 9 threads (12) of tungsten of 1 mm in diameter, and a length of 96 mm, loaded with partially evaporated aluminum, as evaporating material (13), showing accumulation of the load of evaporating material (13) in the lower area (15). Other examples not represented, refer respectively to curved grills (11) with: a) seven tungsten wires (12) of 0.7 mm diameter and 70 mmm length loaded with 1 g of pre-cast and partially evaporated aluminum; b) nine tungsten wires (12) 1 mm in diameter and 107 mm in length.
    [0135] Additionally, the tests have also contemplated various grid configurations (10, 11), varying between shapes that can be assimilated to a V with a rounded corner and others closer to an arc of circumference. Form factors (FF) of between 0.15 and 0.40 have been considered. The use of curved grids (11) with form factors (FF) within this range has shown similar efficiency in the confining effect of the melted evaporating material (13), which is what is sought in curved grids (11). The interval indicated for the form factor (FF) should be considered as a sample of satisfactory achievements and, in no case, as absolute limits. The choice of a specific form factor (FF) when designing a curved grill (11) for a given process must take into account some basic considerations apart from the electrical parameters and their power supplies. In particular, a high form factor (FF) will help to better confine the molten evaporating material (13) in the lower area of the curved grill (11). However, if the load of evaporating material (13) is high, a high form factor (FF) may imply an excessive accumulation of molten evaporating material (13) in the lower area (15), with the consequent risk that part of the evaporating material (13) may come off the curved grill (11) in the form of a large drop.
    [0137] The combination of wire diameter (12) of the refractory metal used, the number of wires (12) configuring the grill (10,11), and the length of the grill (10, 11), allow to manufacture a considerable variety of grills ( 10, 11) with geometries adapted to a wide number of applications.
    [0139] We will make this possibility concrete by exemplifying it in two different types of grills (10, 11) that have been manufactured and used in laboratory tests.
    [0141] Grill 1.
    [0143] Formed by 7 tungsten wires (12) of 0.7 mm diameter and lengths of 60 and 70 mm. They have been manufactured in the two modalities of straight grill (10) and curved grill (11). It has been used with a voltage of 1.30 volts, and a current intensity of approximately 180 amps, to reach a temperature of 1200-1300 ° C, with a load of evaporating material (13) of aluminum for evaporation of between 0, 6 and 0.8 grams.
    [0145] Grill 2.
    [0147] Formed by 9 threads (12) of tungsten of 1 mm in diameter and lengths of 85 mm and 100 mm. They have also been manufactured in the two modalities of straight grill (10) and curved grill (11). It has been used with a voltage of 0.8 to 0.9 volts, and a current intensity equal to or less than 340 amps to reach a temperature of 1200-1300 ° C, with a load of evaporating material (13) of aluminum to evaporation equal to or less than 2 grams.
    权利要求:
    Claims (8)
    [1]
    1. - Thermal source of resistive type for deposition of thin sheets by vacuum evaporation, characterized by comprising:
    - a grill (10, 11) comprising a plurality of refractory metal threads (12) that are juxtaposed side by side in parallel, the grill (10, 11) being intended to support a quantity of an evaporating material (13 ) melted, to be evaporated in vacuum to form a deposit in the form of a thin sheet, where the threads (12) comprise two ends; and
    - two connection sleeves (14), located at the ends, and that hold all the wires (12) together, to connect the wires (12) with an electricity source.
    [2]
    2. - Thermal source, according to claim 1, characterized in that the grill (10, 11) is a straight grill (10) in which the threads (12) are straight, according to a flat configuration.
    [3]
    3. - Thermal source, according to claim 1, characterized in that the grill (10, 11) is a curved grill (11), in which the set of wires (12) comprises a downward curved part, there being a level difference (R) between the ends and a lower part (15) that occupies the lowest level, to confine the evaporating material (13), due to the effect of gravity, in the lower part (15).
    [4]
    4. - Thermal source, according to claim 3, characterized in that the ends are straight.
    [5]
    5. - Thermal source, according to any one of claims 1-4, characterized in that the connection sleeves (14) wrap the wires (12) at the ends.
    [6]
    6. - Thermal source, according to any one of claims 1 and 5, characterized in that the connection bushings (14) are configured as sheets.
    [7]
    7. - Thermal source, according to any one of claims 1-6, characterized in that each wire (12) is in contact with the wire (12) or the wires (12) that are adjacent to it.
    [8]
    8. Thermal source, according to any one of claims 1-7, characterized in that all the wires (12) have the same diameter.
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    同族专利:
    公开号 | 公开日
    WO2020141244A1|2020-07-09|
    ES2770131B2|2020-11-10|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    GB643494A|1946-09-26|1950-09-20|Polytechnic Inst Brooklyn|Improvements relating to the formation of metallic films by thermal evaporation|
    JPH0647356U|1992-12-02|1994-06-28|三菱樹脂株式会社|Heating filament for vacuum deposition|
    KR20030080363A|2002-04-08|2003-10-17|주식회사 아벡테크|The boat for high speed evaporation and the fabrication method for the same|
    法律状态:
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